# Plasma Etching, ALE and RIE

- Dates: 25 August 2026 to 26 August 2026
- Location: Milpitas, United States
- Industry: Manufacturing

## About

This course discusses the fundamentals of plasma assisted phenomena and reactive ion etching (RIE) processes. It emphasizes the physical and chemical processes that determine reactive gas plasma/surface interaction consequences. The course also describes plasma-assisted etching equipment.

## Official links

- [Official website](https://www.semi.org/en/event/plasma-etching-ale-rie-americas-eu-0)
- [Registration](https://www.semi.org/en/semi-university/course-calendar)

## Topics

- Industrial Engineering

## Speakers

- Richard Beaudry, PT International, LLC

## Ticket pricing

USD 745 to 845

## Where to stay

- **Days Inn by Wyndham San Jose Airport**: 510 m from the venue, 270 South Abbott Avenue, Milpitas, 95035
  - [Hotel website](https://www.wyndhamhotels.com/days-inn/milpitas-california/days-inn-by-wyndham-san-jose-airport/overview)
  - Phone: +1 408-883-3487
- **Best Western Plus Brookside Inn**: 730 m from the venue, 400 Valley Way, Milpitas, 95035
  - [Hotel website](https://www.bestwestern.com/en_US/book/hotels-in-milpitas/best-western-plus-brookside-inn/propertyCode.05538.html)
  - Phone: +1 408-263-5566
- **Hampton Inn Milpitas**: 1.3 km from the venue, 215 Barber Court, Milpitas, 95035
  - [Hotel website](https://www.hilton.com/en/hotels/sfomphx-hampton-milpitas/)
  - Phone: +1 408-428-9090
- **Sonesta San Jose - Milpitas**: 1.3 km from the venue, 777 Bellew Drive, Milpitas, 95035
  - [Hotel website](https://www.sonesta.com/us/california/milpitas/sonesta-san-jose)
  - Phone: +1-408-321-9500
- **Larkspur Landing Milpitas**: 1.4 km from the venue, 40 Ranch Drive, Milpitas, 95035
  - [Hotel website](https://www.larkspurhotels.com/milpitas/)
  - Phone: +1-408-719-1212
- **Extended Stay America San Jose – Milpitas – McCarthy Ranch**: 1.4 km from the venue, 330 Cypress Drive, Milpitas, 95035
- **Embassy Suites Milpitas**: 1.5 km from the venue, 901 East Calaveras Boulevard, Milpitas, 95035
  - [Hotel website](https://www.hilton.com/en/hotels/milcaes-embassy-suites-milpitas-silicon-valley/)
  - Phone: +1 408-942-0400
- **Hilton Garden Inn San Jose/Milpitas**: 1.5 km from the venue, 30 Ranch Drive, Milpitas, 95035
  - [Hotel website](https://hiltongardeninn3.hilton.com/en/hotels/california/hilton-garden-inn-san-jose-milpitas-SJCMHGI/index.html)

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Source: https://www.luminik.io/events/plasma-etching-ale-and-rie-milpitas/